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[IEEE IEEE Micro Electro Mechanical Systems - Nara, Japan (30 Jan.-2 Feb. 1991)] [1991] Proceedings. IEEE Micro Electro Mechanical Systems - Magnetic micro-actuator

[IEEE IEEE Micro Electro Mechanical Systems - Nara, Japan (30 Jan.-2 Feb. 1991)] [1991] Proceedings. IEEE Micro Electro Mechanical Systems - Magnetic micro-actuator

Yanagisawa, K.; Tago, A.; Ohkubo, T.; Kuwano, H.

作者Yanagisawa, K.; Tago, A.; Ohkubo, T.; Kuwano, H.
文件大小214.15KB
发表时间1991
DOI10.1109/memsys.1991.114781
页码120-124

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