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Preparation of aluminum thin films by the facing targets sputtering system

Preparation of aluminum thin films by the facing targets sputtering system

Toyoaki Hirata; Masao Nagakubo; Masahiko Naoe

作者Toyoaki Hirata; Masao Nagakubo; Masahiko Naoe
卷第134卷
印刷ISSN0921-5093
文件大小383.08KB
发表时间1991
DOI10.1016/0921-5093(91)90969-t
页码1260-1263

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