Scanning tunneling microscope lithography: A solution to electron scattering
- 期刊名称Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- 作者Dobisz, E. A.
- 卷第9卷
- 期第6期
- 印刷ISSN0734-211X
- 文件大小777.48KB
- 发表时间1991-11
- DOI10.1116/1.585362
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