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[IEEE [1991] GaAs IC Symposium Technical Digest - Monterey, CA, USA (20-23 Oct. 1991)] [1991] GaAs IC Symposium Technical Digest - Magnetron reactive ion etching for GaAs IC manufacturing technology

[IEEE [1991] GaAs IC Symposium Technical Digest - Monterey, CA, USA (20-23 Oct. 1991)] [1991] GaAs IC Symposium Technical Digest - Magnetron reactive ion etching for GaAs IC manufacturing technology

Namaroff, M.; Sasserath, J.; Meyyappan, M.; McLane, G.; Lee, H.S.; Cole, M.W.

作者Namaroff, M.; Sasserath, J.; Meyyappan, M.; McLane, G.; Lee, H.S.; Cole, M.W.
文件大小308.37KB
发表时间1991
DOI10.1109/gaas.1991.172696
页码297-300

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