[IEEE IEEE Conference Record - Abstracts 1991 IEEE International Conference on Plasma Science - Williamsburg, VA, USA (3-5 June 1991)] IEEE Conference Record - Abstracts 1991 IEEE International Conference on Plasma Science - The Future Of Plasma Processing in Microelectronic Fabrication
- 作者Herb, S.K.
- 文件大小66.31KB
- 发表时间1991
- DOI10.1109/plasma.1991.695577
- 页码133-133
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