Analysis of cyclic deposition of diamond
- 期刊名称Journal of Applied Physics
- 作者Wang, Hai; Frenklach, Michael
- 卷第70卷
- 期第11期
- 印刷ISSN0021-8979
- 文件大小923.16KB
- 发表时间1991
- DOI10.1063/1.349796
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