Measurement of the Thickness and Optical Properties of Thermal Oxides of Si Using Spectroscopic Ellipsometry and Stylus Profilometry
- 期刊名称Journal of The Electrochemical Society
- 作者Mrstik, B. J.
- 卷第138卷
- 期第6期
- 印刷ISSN0013-4651
- 文件大小1116.76KB
- 发表时间1991
- DOI10.1149/1.2085871
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