Stress and Microstructure in Lpcvd Polycrystalline Silicon Films: Experimental Results and Closed Form Modeling of Stresses

• 期刊名称MRS Proceedings
• 作者Krulevitch, P.; Johnson, G. C.; Howe, R. T.
• 卷第239卷
• 电子ISSN1946-4274
• 文件大小2286.80KB
• 发表时间1991-1
• DOI10.1557/proc-239-13