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SPIE Proceedings [SPIE Shanghai - DL tentative - Shanghai, China (Monday 1 April 1991)] International Conference on Thin Film Physics and Applications - <title>High-field electron trapping and detrapping characteristics in thin SiO<formula><inf><roman>x</roman></inf></formula>N<formula><inf><roman>y</roman></inf></formula> films</title>

SPIE Proceedings [SPIE Shanghai - DL tentative - Shanghai, China (Monday 1 April 1991)] International Conference on Thin Film Physics and Applications - High-field electron trapping and detrapping characteristics in thin SiO<formula><inf><roman>x</roman></inf></formula>N<formula><inf><roman>y</roman></inf></formula> films

Yang, Bing L.; Liu, Bai Y.; Cheng, Y. C.; Wong, HonLeung K.; Zhou, Shixun; Wang, Yongling
  • 作者Yang, Bing L.; Liu, Bai Y.; Cheng, Y. C.; Wong, HonLeung K.; Zhou, Shixun; Wang, Yongling
  • 卷第1519卷
  • 印刷ISSN0277-786X
  • 文件大小279.77KB
  • 发表时间1991
  • DOI10.1117/12.47267
  • 页码241-246
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