Chemical vapour deposition of TiN layers in various glow discharge regions
- 作者J. Michalski; T. Wierzchoń
- 卷第10卷
- 期第9期
- 印刷ISSN0261-8028
- 电子ISSN1573-4811
- 文件大小1856.95KB
- 发表时间1991-05-1
- DOI10.1007/bf00726920
- 页码506-508
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