ATTEMPT OF TARGET SLANTING ON FACING TARGETS SPUTTERING SYSTEM
- 期刊名称Journal of the Magnetics Society of Japan
- 作者NAGAKUBO, Masao; HIRATA, Toyoaki; MUROI, Hironobu; NAOE, Masahiko
- 卷第15卷
- 印刷ISSN0285-0192
- 电子ISSN1880-4004
- 文件大小548.54KB
- 发表时间1991
- DOI10.3379/jmsjmag.15.s2_939
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