[AIP Vacuum design of synchrotron light sources - Argonne, Illinois (USA) (13−15 Nov 1990)] AIP Conference Proceedings - Design of the vacuum system TNK dedicated synchrotron source for X-ray lithography
Anashin, V. V.; Bulygin, A. N.; Gavrilov, N. G.; Kollerov, E. P.; Korchuganov, V. N.; Nikitin, A. I.; Osipov, V. N.; Trakhtenberg, E. M.
- 作者Anashin, V. V.; Bulygin, A. N.; Gavrilov, N. G.; Kollerov, E. P.; Korchuganov, V. N.; Nikitin, A. I.; Osipov, V. N.; Trakhtenberg, E. M.
- 卷第236卷
- 文件大小595.73KB
- 发表时间1991
- DOI10.1063/1.41123
- 页码30-38