Growth process, structure and thermal stability of a-Si1−xNx:H films
- 作者A.A. Aivazov; B.G. Budaguan; A.Yu. Sazonov; D.A. Stryahilev
- 卷第146卷
- 印刷ISSN0022-3093
- 文件大小467.95KB
- 发表时间1992
- DOI10.1016/s0022-3093(05)80491-0
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