Influence of manufacturing process of indium tin oxide sputtering targets on sputtering behavior
- 作者B.L. Gehman; S. Jonsson; T. Rudolph; M. Scherer; M. Weigert; R. Werner
- 卷第220卷
- 印刷ISSN0040-6090
- 文件大小419.25KB
- 发表时间1992
- DOI10.1016/0040-6090(92)90594-2
- 页码333-336
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