Precise measurement of flow rates of vaporized tetraethylgermanium carried by an inert gas

• 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
• 作者Gazicki, Maciej
• 卷第10卷
• 期第1期
• 印刷ISSN0734-2101
• 文件大小785.75KB
• 发表时间1992-1
• DOI10.1116/1.578149