Non-destructive characterization of thin film SIMOX structures using microscope spectrophotometry

• 作者Alan J. Criddle; Peter J. Pearson; Karen J. Reeson; Amarjit K. Robinson; Peter L.F. Hemment; Chris D. March; G.Roger Booker
• 卷第12卷
• 印刷ISSN0921-5107
• 文件大小630.46KB
• 发表时间1992
• DOI10.1016/0921-5107(92)90283-f
• 页码185-190