Fabrication of microdiaphragm pressure sensor utilizing micromachining
- 作者Tetsuo Fujii; Yoshitaka Gotoh; Susumu Kuroyanagi
- 卷第34卷
- 期第3期
- 印刷ISSN0924-4247
- 文件大小2842.91KB
- 发表时间1992
- DOI10.1016/0924-4247(92)85005-m
- 页码217-224
SAE Technical Paper Series [SAE International International Truck & Bus Meeting & Exposition - (NOV. 17, 1997)] SAE Technical Paper Series - A Comparison Between Micromachined Piezoresistive and Capacitive Pressure SensorsBaney, W.; Chilcott, D.; Huang, X.; Long, S.; Siekkinen, J.; Sparks, D.; Staller, S. · 1997
[IEEE TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - San Francisco, CA, USA (24-27 June 1991)] TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - A comparison between micromachined pressure sensors using quartz or silicon vibrating beamsDufour, M.; Delaye, M.T.; Michel, F.; Danel, J.S.; Diem, B.; Delapierre, G. · 1991