Microwave-enhanced magnetron sputtering
- 期刊名称Review of Scientific Instruments
- 作者Yoshida, Yoshikazu
- 卷第63卷
- 期第1期
- 印刷ISSN0034-6748
- 文件大小737.96KB
- 发表时间1992
- DOI10.1063/1.1142953
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