Effects of Rapid Thermal Annealing on SiNx Capped MBE GaAs
- 期刊名称MRS Proceedings
- 作者Ito, Akira; Usami, Akira; Ueda, Hiroyuki; Kano, Hiroyuki; Wada, Takao
- 卷第262卷
- 电子ISSN1946-4274
- 文件大小306.68KB
- 发表时间1992-1
- DOI10.1557/proc-262-905
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