Pulsed Laser Deposition of Thin Silicon Nitride Films
- 期刊名称MRS Proceedings
- 作者Xu, Xiangqun; Seki, Kanekazu; Chen, Naiqun; Okabe, Hideo; Frye, Joan M.; Halpern, Joshua B.
- 卷第285卷
- 电子ISSN1946-4274
- 文件大小261.94KB
- 发表时间1992-1
- DOI10.1557/proc-285-331
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