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SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Scanning Microscopy Instrumentation - <title>Application of a 2-D atomic force microscope system to metrology</title>

SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Scanning Microscopy Instrumentation - Application of a 2-D atomic force microscope system to metrology

Nyyssonen, Diana; Landstein, Laszlo; Coombs, E.; Kino, Gordon S.

作者Nyyssonen, Diana; Landstein, Laszlo; Coombs, E.; Kino, Gordon S.
卷第1556卷
印刷ISSN0277-786X
文件大小221.65KB
发表时间1992
DOI10.1117/12.134902
页码79-87

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