Short-length gauges for monitoring the manufacture of integrated circuits
- 作者N. L. Istomina; O. V. Sychev; F. N. Basmanov; L. N. Nevzorova
- 卷第35卷
- 期第1期
- 印刷ISSN0543-1972
- 电子ISSN1573-8906
- 文件大小455.93KB
- 发表时间1992-01
- DOI10.1007/bf00977875
- 页码36-40
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