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Damage distribution in GaAs implanted at elevated temperature

Damage distribution in GaAs implanted at elevated temperature

M. Kalitzova; D. Karpuzov; N. Pashov; G. Vitali; M. Rossi; R. Scholz

作者M. Kalitzova; D. Karpuzov; N. Pashov; G. Vitali; M. Rossi; R. Scholz
印刷ISSN0168-583X
文件大小298.09KB
发表时间1993
DOI10.1016/0168-583x(93)96201-m
页码647-650

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