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Epitaxial growth of Cu thin films on atomically cleaned (111)Si at room temperature

Epitaxial growth of Cu thin films on atomically cleaned (111)Si at room temperature

C.S. Liu; S.R. Chen; W.J. Chen; L.J. Chen

作者C.S. Liu; S.R. Chen; W.J. Chen; L.J. Chen
卷第36卷
印刷ISSN0254-0584
文件大小564.88KB
发表时间1993
DOI10.1016/0254-0584(93)90027-j
页码170-173

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