Study on the hydrogen depth profiles in amorphous silicon films by elastic recoil detection

• 作者Liao Changgeng; Wang Yongqiang; Yang Shengsheng; Jiang Hui; Zheng Zhihao
• 卷第44卷
• 印刷ISSN0042-207X
• 文件大小408.23KB
• 发表时间1993
• DOI10.1016/0042-207x(93)90346-c
• 页码1193-1196