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On-line detection and monitoring of plasma etch damage to semi-insulating GaAs

On-line detection and monitoring of plasma etch damage to semi-insulating GaAs

P.A.F. Herbert; M. Murtagh; P.V. Kelly; G.M. Crean; W.M. Kelly

作者P.A.F. Herbert; M. Murtagh; P.V. Kelly; G.M. Crean; W.M. Kelly
卷第21卷
印刷ISSN0167-9317
文件大小456.71KB
发表时间1993
DOI10.1016/0167-9317(93)90081-f
页码315-320

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