Diamond tips and nanometer-scale mechanical polishing
Zhipeng Chang; Zili Ma; Jian Shen; Xing Chu; Changxin Zhu; Jing Wang; Shijin Pang; Zengquan Xue
- 作者Zhipeng Chang; Zili Ma; Jian Shen; Xing Chu; Changxin Zhu; Jing Wang; Shijin Pang; Zengquan Xue
- 印刷ISSN0169-4332
- 文件大小672.02KB
- 发表时间1993
- DOI10.1016/0169-4332(93)90466-o
- 页码407-412