Microstructural properties of DC magnetron sputtered a-Si:H and a-Si1−xCx:H

• 作者Davor Gracin; Mile Ivanda; Stjepan Lugomer; UrošV. Desnica; Nikola Radić
• 印刷ISSN0169-4332
• 文件大小304.89KB
• 发表时间1993
• DOI10.1016/0169-4332(93)90602-8
• 页码686-690