Formation of SiGe and SiGeC Layers on Si by Ge and C Ion Implantation and Subsequent Ion-Beam-Induced Epitaxial Crystallization
Kobayashi, Naoto; Hasegawa, Masataka; Phillips, J.R.; Hayashi, Nobuyuki; Tanoue, Hisao; Shibata, Hajime; Makita, Yunosuke
- 期刊名称MRS Proceedings
- 作者Kobayashi, Naoto; Hasegawa, Masataka; Phillips, J.R.; Hayashi, Nobuyuki; Tanoue, Hisao; Shibata, Hajime; Makita, Yunosuke
- 卷第316卷
- 电子ISSN1946-4274
- 文件大小454.61KB
- 发表时间1993-1
- DOI10.1557/proc-316-771