Excimer Laser Crystallization of Amorphous Silicon Films for Poly-Si TFT Fabrication
- 期刊名称MRS Proceedings
- 作者Tanabe, Hiroshi; Sera, Kenji; Nakamura, Ken-Ichi; Hirata, Kazumi; Yuda, Katsuhisa; Okumura, Fujio
- 卷第321卷
- 电子ISSN1946-4274
- 文件大小1035.88KB
- 发表时间1993-1
- DOI10.1557/proc-321-677
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