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SPIE Proceedings [SPIE Measurement Technology and Intelligent Instruments - Wuhan, China (Friday 29 October 1993)] Measurement Technology and Intelligent Instruments - <title>High-precision laser interferometer for length metrology</title>

SPIE Proceedings [SPIE Measurement Technology and Intelligent Instruments - Wuhan, China (Friday 29 October 1993)] Measurement Technology and Intelligent Instruments - High-precision laser interferometer for length metrology

Pi, Jiajing; Zhao, Li-Zhuan; Du, Jian-Guo; Shen, Wei-Guo; Zhu, Li

作者Pi, Jiajing; Zhao, Li-Zhuan; Du, Jian-Guo; Shen, Wei-Guo; Zhu, Li
卷第2101卷
印刷ISSN0277-786X
文件大小224.00KB
发表时间1993
DOI10.1117/12.156509
页码582-585

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