SPIE Proceedings [SPIE OE/LASE'93: Optics, Electro-Optics, & Laser Applications in Science& Engineering - Los Angeles, CA (Sunday 17 January 1993)] Laser Resonators and Coherent Optics: Modeling, Technology, and Applications - Design and manufacture of optical system for use in ultraviolet lithography with the free-electron laser
Byrd, Donald A.; Viswanathan, Vriddhachalam K.; Woodfin, Gregg L.; Horn, William W.; Lazazzera, Vito J.; Schmell, Rodney A.; Bhowmik, Anup
- 作者Byrd, Donald A.; Viswanathan, Vriddhachalam K.; Woodfin, Gregg L.; Horn, William W.; Lazazzera, Vito J.; Schmell, Rodney A.; Bhowmik, Anup
- 卷第1868卷
- 印刷ISSN0277-786X
- 文件大小2025.01KB
- 发表时间1993
- DOI10.1117/12.150634
- 页码180-195