NUMERICAL SIMULATION OF THE THERMAL OXIDATION OF POLYCRYSTALLINE SILICON

• 期刊名称COMPEL - The international journal for computation and mathematics in electrical and electronic engineering
• 作者Gadiyak, G.V.; Korobitsina, J.L.; Kramarenko, V.I.
• 卷第12卷
• 期第4期
• 印刷ISSN0332-1649
• 文件大小249.17KB
• 发表时间1993-04
• DOI10.1108/eb051815
• 页码417-422