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Measurement techniques for the determination of doping and mobility profiles in GaAs epitaxial layers

Measurement techniques for the determination of doping and mobility profiles in GaAs epitaxial layers

B. Szentpáli; B. Kovács; F. Riesz; V. V. Tuyen

作者B. Szentpáli; B. Kovács; F. Riesz; V. V. Tuyen
卷第74卷
印刷ISSN0231-4428
文件大小387.87KB
发表时间1994-03
DOI10.1007/bf03055234
页码21-30

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