Growth of silicon carbide films via C60 precursors
- 作者A.V. Hamza; M. Balooch; M. Moalem
- 卷第317卷
- 期第3期
- 印刷ISSN0039-6028
- 文件大小1675.32KB
- 发表时间1994
- DOI10.1016/0039-6028(94)90279-8
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