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SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Microelectronic Processes, Sensors, and Controls - <title>Comparison of rapid thermal processing and furnace processing for quarter-micrometer CMOS</title>

SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Microelectronic Processes, Sensors, and Controls - Comparison of rapid thermal processing and furnace processing for quarter-micrometer CMOS

El-Kareh, Badih; Ghatalia, Ashwin; Kellam, Mark D.; Maillot, Philippe; Osburn, Carlton M.; Zhang, Xiaoqiang; Bondur, James A.; Elliott, Kiefer; Hauser, John R.; Kwong, Dim-Lee; Ray, Asit K.
  • 作者El-Kareh, Badih; Ghatalia, Ashwin; Kellam, Mark D.; Maillot, Philippe; Osburn, Carlton M.; Zhang, Xiaoqiang; Bondur, James A.; Elliott, Kiefer; Hauser, John R.; Kwong, Dim-Lee; Ray, Asit K.
  • 卷第2091卷
  • 印刷ISSN0277-786X
  • 文件大小665.59KB
  • 发表时间1994
  • DOI10.1117/12.167352
  • 页码36-50
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