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$Non-alloyed, refractory metal contact optimization with shallow implantations of Zn and Mg$

Non-alloyed, refractory metal contact optimization with shallow implantations of Zn and Mg

M.L. Lovejoy; J.C. Zolper; M.E. Sherwin; A.G. Baca; R.J. Shul; D.J. Rieger; J.F. Klem

作者M.L. Lovejoy; J.C. Zolper; M.E. Sherwin; A.G. Baca; R.J. Shul; D.J. Rieger; J.F. Klem
卷第253卷
印刷ISSN0040-6090
文件大小505.89KB
发表时间1994
DOI10.1016/0040-6090(94)90373-5
页码496-500