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Advanced scientific semiconductor processing based on high-precision controlled low-energy ion bombardment

Advanced scientific semiconductor processing based on high-precision controlled low-energy ion bombardment

Tadahiro Ohmi; Tadashi Shibata
  • 作者Tadahiro Ohmi; Tadashi Shibata
  • 卷第241卷
  • 印刷ISSN0040-6090
  • 文件大小743.62KB
  • 发表时间1994
  • DOI10.1016/0040-6090(94)90418-9
  • 页码159-166
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