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[IEEE 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM) - Santa Barbara, CA, USA (27-31 March 1994)] Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM) - Reactive ion etching-induced damage in InAlAs/InGaAs heterostructures

[IEEE 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM) - Santa Barbara, CA, USA (27-31 March 1994)] Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM) - Reactive ion etching-induced damage in InAlAs/InGaAs heterostructures

Agarwala, S.; Adesida, I.; Caneau, C.; Bhat, R.

作者Agarwala, S.; Adesida, I.; Caneau, C.; Bhat, R.
文件大小379.43KB
发表时间1994
DOI10.1109/iciprm.1994.328252
页码391-394

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