Single wafer process integration for submicron structures
- 期刊名称Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- 作者Masnari, N. A.
- 卷第12卷
- 期第4期
- 印刷ISSN0734-211X
- 文件大小535.10KB
- 发表时间1994-7
- DOI10.1116/1.587186
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