Surface recession and oxidation of silicon during bombardment by low energy oxygen ions
- 期刊名称Journal of Applied Physics
- 作者Svensson, B. G.; Mohadjeri, B.; Petravić, M.
- 卷第76卷
- 期第6期
- 印刷ISSN0021-8979
- 文件大小767.08KB
- 发表时间1994
- DOI10.1063/1.357386
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