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[IEEE International Conference on Multichip Modules - Denver, CO (April 13-15, 1994)] Proceedings of the International Conference on Multichip Modules - A Large Format Modified TEA CO/sub 2/ Laser Based Process for Cost Effective Small Via Generation

[IEEE International Conference on Multichip Modules - Denver, CO (April 13-15, 1994)] Proceedings of the International Conference on Multichip Modules - A Large Format Modified TEA CO/sub 2/ Laser Based Process for Cost Effective Small Via Generation

Morrison, J.M.; Tessier, T.G.; Gu, B.

作者Morrison, J.M.; Tessier, T.G.; Gu, B.
文件大小809.56KB
发表时间1994
DOI10.1109/icmcm.1994.753577
页码369-377

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