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Electrical Properties for Capacitors of Dynamic Random Access Memory on
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Thin Films by Metalorganic Chemical Vapor Deposition

Electrical Properties for Capacitors of Dynamic Random Access Memory on ( P b , L a )( Z r , T i ) O ₃ Thin Films by Metalorganic Chemical Vapor Deposition

Nakasima, Hiroshi; Hazumi, Sigeki; Kamiya, Tadashi; Tominaga, Kouji; Okada, Masaru

期刊名称Japanese Journal of Applied Physics
作者Nakasima, Hiroshi; Hazumi, Sigeki; Kamiya, Tadashi; Tominaga, Kouji; Okada, Masaru
卷第33卷
印刷ISSN0021-4922
电子ISSN1347-4065
文件大小570.66KB
发表时间1994-9-30
DOI10.1143/JJAP.33.5139
页码5139-5142

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