SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Microelectronic Processes, Sensors, and Controls - Benchmarking of temperature measurement and control capability of commercially available rapid thermal processor (RTP) systems
Velaga, Ankineedu; Brown, Jim; Lindholm, Donald W.; Bondur, James A.; Elliott, Kiefer; Hauser, John R.; Kwong, Dim-Lee; Ray, Asit K.
- 作者Velaga, Ankineedu; Brown, Jim; Lindholm, Donald W.; Bondur, James A.; Elliott, Kiefer; Hauser, John R.; Kwong, Dim-Lee; Ray, Asit K.
- 卷第2091卷
- 印刷ISSN0277-786X
- 文件大小482.03KB
- 发表时间1994
- DOI10.1117/12.167336
- 页码13-23