Sputtered BaTiO 3 films for silicon on insulator structures
- 期刊名称Ferroelectrics
- 作者Nagatomo, Takao; Tanaka, Keiich; Yamanashi, Akira; Omoto, Osamu
- 卷第152卷
- 期第1期
- 印刷ISSN0015-0193
- 电子ISSN1563-5112
- 文件大小519.74KB
- 发表时间1994-02
- DOI10.1080/00150199408017609
- 页码133-138
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