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SPIE Proceedings [SPIE Optics Quebec - Quebec City, Canada (Monday 16 August 1993)] Laser-Assisted Fabrication of Thin Films and Microstructures - <title>Fabrication of perfectly three-dimensional microstructures by UV depth lithography</title>

SPIE Proceedings [SPIE Optics Quebec - Quebec City, Canada (Monday 16 August 1993)] Laser-Assisted Fabrication of Thin Films and Microstructures - Fabrication of perfectly three-dimensional microstructures by UV depth lithography

Engelmann, Gunter; Ehrmann, Oswin; Leutenbauer, Rudolf; Schmitz, Heike; Reichl, Herbert; Boyd, Ian W.
  • 作者Engelmann, Gunter; Ehrmann, Oswin; Leutenbauer, Rudolf; Schmitz, Heike; Reichl, Herbert; Boyd, Ian W.
  • 卷第2045卷
  • 印刷ISSN0277-786X
  • 文件大小2452.56KB
  • 发表时间1994
  • DOI10.1117/12.167571
  • 页码306-313
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