SPIE Proceedings [SPIE Optics Quebec - Quebec City, Canada (Monday 16 August 1993)] Laser-Assisted Fabrication of Thin Films and Microstructures - Fabrication of perfectly three-dimensional microstructures by UV depth lithography
Engelmann, Gunter; Ehrmann, Oswin; Leutenbauer, Rudolf; Schmitz, Heike; Reichl, Herbert; Boyd, Ian W.
- 作者Engelmann, Gunter; Ehrmann, Oswin; Leutenbauer, Rudolf; Schmitz, Heike; Reichl, Herbert; Boyd, Ian W.
- 卷第2045卷
- 印刷ISSN0277-786X
- 文件大小2452.56KB
- 发表时间1994
- DOI10.1117/12.167571
- 页码306-313