SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Microelectronic Processes, Sensors, and Controls - Empirical models in semiconductor processing: optimization and assessment as simulators

Lavelle, Steve W.; Wood, David; Hydes, A. J.; Bondur, James A.; Elliott, Kiefer; Hauser, John R.; Kwong, Dim-Lee; Ray, Asit K.

作者Lavelle, Steve W.; Wood, David; Hydes, A. J.; Bondur, James A.; Elliott, Kiefer; Hauser, John R.; Kwong, Dim-Lee; Ray, Asit K.
卷第2091卷
印刷ISSN0277-786X
文件大小668.77KB
发表时间1994
DOI10.1117/12.167365
页码452-459

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