$SPIE Proceedings [SPIE Optics Quebec - Quebec City, Canada (Monday 16 August 1993)] Laser-Assisted Fabrication of Thin Films and Microstructures - <title>Manufacture of diffractive structures in metal and semiconductor thin films by pulse laser irradiation</title>$

SPIE Proceedings [SPIE Optics Quebec - Quebec City, Canada (Monday 16 August 1993)] Laser-Assisted Fabrication of Thin Films and Microstructures - Manufacture of diffractive structures in metal and semiconductor thin films by pulse laser irradiation

Kalyashova, Zoya N.; Sabinin, Vladimir E.; Korolev, V. I.; Mesnyankin, E. P.; Boyd, Ian W.

作者Kalyashova, Zoya N.; Sabinin, Vladimir E.; Korolev, V. I.; Mesnyankin, E. P.; Boyd, Ian W.
卷第2045卷
印刷ISSN0277-786X
文件大小577.72KB
发表时间1994
DOI10.1117/12.167553
页码338-343

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SPIE Proceedings [SPIE Optics Quebec - Quebec City, Canada (Monday 16 August 1993)] Laser-Assisted Fabrication of Thin Films and Microstructures - Manufacture of diffractive structures in metal and semiconductor thin films by pulse laser irradiation