[AIP Stress-induced phenomena in metallization: Second international workshop - Austin, Texas (USA) (29−31 Mar 1993)] AIP Conference Proceedings - Reliability of single-crystal aluminum lines and its limitation
- 作者Kaneko, Hisashi; Kawanoue, Takashi; Hasunuma, Masahiko; Miyauchi, Masami
- 卷第305卷
- 文件大小1484.82KB
- 发表时间1994
- DOI10.1063/1.45690
- 页码179-194
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