Growth Rate of TiN Films by Chemical-Vapour-Deposition
- 作者Yoshikawa, Noboru; Higashino, Kazuyuki; Kikuchi, Atsushi
- 卷第58卷
- 期第4期
- 印刷ISSN0021-4876
- 电子ISSN1880-6880
- 文件大小415.49KB
- 发表时间1994
- DOI10.2320/jinstmet1952.58.4_442
- 页码442-447
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